Published: CABEQ 23 (1) (2009) 1–9
Paper type: Original Scientific Paper
G. G. Láng, N. S. Sas and S. Vesztergom
In the present paper, the different techniques used for the determination of changes of surface stress of solid electrodes, as well as the kind and quality of information that can be achieved using these methods are discussed. The most important methods are briefly reviewed and advantages/drawbacks highlighted. Special attention is paid to issues related to the use of the “bending beam” (“bending cantilever”, “laser beam deflection”, “wafer curvature”, etc.) methods. Recent development in these techniques has been introduced and discussed.
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Electrochemical system, surface stress, surface tension, solid/liquid interface, solid electrode